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Nanometrology
Abbreviation: NANOMJLoad: 30(L) + 0(E) + 30(LE) + 0(CE) + 0(PEE) + 0(FE) + 0(S) + 0(DE) + 0(P) + 0(FLE) + 0()
Lecturers in charge: doc. dr. sc. Gorana Baršić
Lecturers: doc. dr. sc. Marko Katić ( Laboratory exercises, Lectures )
doc. dr. sc. Vedran Šimunović ( Laboratory exercises, Lectures )
doc. dr. sc. Gorana Baršić ( Laboratory exercises )
Course description: Course objectives:
1. Theoretical principles of nanometrology. 2. Problems in ensuring measurement traceability in the field of dimensional nanometrology. 3. Measurement methods and measuring equipment in the field on nanometrology.

Enrolment requirements and required entry competences for the course:


Student responsibilities:
Attending lectures and exercises. Writing a seminar from the given topic and public presentation with discussion.

Grading and evaluation of student work over the course of instruction and at a final exam:
Active participation during lecturers or exercises 10% Quality of seminar paper 50% Oral public presentation of seminar (discussion, questions, answers) 40%

Methods of monitoring quality that ensure acquisition of exit competences:
In order to have continuous monitoring of quality performance of the Course an anonymous, simple and quick questionnaires of student"s opinion will be preformed by use of module Moodle application Question. The readiness of students to other forms of engagement will be analyzed (research, discussion, development projects, etc.) At the end, the quality of Course will be assessed through University questionnaire that student fulfills online, through the ISVU system, in order to evaluate work of teachers and the attractiveness of topics.

Upon successful completion of the course, students will be able to (learning outcomes):
1. Interpret fundamental metrological concepts and theoretical principles in the field of dimensional nanometrology. 2. Compare and recommend the method in the field of dimensional nanometrology with respect to the measurand. 3. Conduct interferometric measurements in the field of dimensional nanometrology. 4. Critically deliberate the reproducibility of measurement results in the field of dimensional nanometrology. 5. Debate the issues of ensuring traceability in the field of dimensional nanometrology.

Lectures

Exercises
Lecture languages: hr
Compulsory literature:
1. D.J.Whitehouse, "The Handbook of Surface and Nanometrology", Institute of Physics Pub, 1999.
2. F.T.Farago, M.A.Curtis, "Handbook of Dimensional Measurement", Industrial Press Inc. New York, 2012.
3. B. Dorband, H. Muller, H. Gross, Handbook of Optical Systems, 2012, Volume 5.
4. European Nanometrology 2020, Co-ordination of Nanometrology in Europe Co-Nanomet, 2011.
Recommended literature: - - -
Legend
L - Lectures
FLE - Practical foreign language exercises
-
E - Exercises
LE - Laboratory exercises
CE - Project laboratory
PEE - Physical education excercises
FE - Field exercises
S - Seminar
DE - Design exercises
P - Practicum
* - Not graded
Copyright (c) 2006. Ministarstva znanosti, obrazovanja i športa. Sva prava zadržana.
Programska podrška (c) 2006. Fakultet elektrotehnike i računarstva.
Oblikovanje(c) 2006. Listopad Web Studio.
Posljednja izmjena 2019-06-07